ATLEX-1000-I準分子雷射 特點
- 預先電離產生脈衝
- 高壓固態脈衝產生器
- 雷射頭體積 <>
- TMC（全金屬陶瓷）雷射管
- 集成真空泵和鹵素過濾器
- 風冷/可選液冷，主動熱管理系統
- 用於系統集成的 RS-485、RS232、USB 和光纖接口
- 可清洗的光學支架
- 能量穩定
- 符合歐洲 CE 標準
- RoHS 合規
ATLEX-1000-I準分子雷射 應用：
- 微加工
- 雷射燒蝕
- 醫學（屈光雷射近視手術）
- 光譜學
- 計量學
| ATLEX-1000-I Specifications | |||
| Gas Medium | ArF | KrF | Units |
| Wavelength | 193 | 248 | nm |
| High Voltage Switching Technique | Solid State Switch | ||
| Max. Pulse Energy 1 | 10 | 15 | mJ |
| Max. Average Power | 8 | 10 | W |
| Max. Rep Rate | 1000 | Hz | |
| Pulse Duration 2 | 5 – 8 | ns | |
| Beam Dimensions 2 (V x H) | 4 x 6 | mm | |
| Beam Divergence 2 (V x H) | 1 x 2 | mrad | |
| Energy Stability (standard deviation) | <> | % | |
| Dimensions (LxWxH) click here for details | 540 x 470 x 370 | mm | |
| Weight | 60 | kg | |
| Cooling | Cooling Air / Optional Liquid | ||
| Power requirement | 230 VAC / 10 A / 1 phase / 50-60 Hz | ||
- Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
- Typical value, FWHM
