ATLEX-S準分子雷射 特點
- 超緊湊尺寸
- 電暈電離產生雷射
- 高壓固態雷射脈衝產生
- 激光頭體積 < 3l="">
- TMC（全金屬陶瓷）雷射管容器
- 集成真空泵和鹵素過濾器於一體
- 風冷的主動散熱管理模組
- 用於系統集成的 RS-485、RS232、USB 和光纖接口
- 方便清理的光學支架
- 能量穩定的模式
- 符合歐洲 CE 標準
- RoHS 規範
- 醫學（屈光近視手術）
- 雷射光譜學
- 雷射微加工
- 測試和測量
| ATLEX-S Specifications | |||||
| Gas Medium | ArF | KrF | Units | ||
| Wavelength | 193 | 248 | nm | ||
| High Voltage Switching Technique | Solid State Switch | Solid State Switch | |||
| Max. Rep. Rate | 300 | 500 | 300 | 500 | Hz |
| Max. Pulse Energy 1 | 10 | 10 | 15 | 15 | mJ |
| Max. Average Power | 2,4 | 4 | 4 | 6 | W |
| Pulse Duration 2 | 5 – 8 | ns | |||
| Beam Dimensions 2 (V x H) | 4 x 6 | mm | |||
| Beam Divergence 2 (V x H) | 1 x 2 | mrad | |||
| Energy Stability (standard deviation) | < 3=""> | % | |||
| Dimensions (LxWxH) click here for details | 630 x 400 x 300 | mm | |||
| Weight | 65 | kg | |||
| Cooling | Air | ||||
| Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz | ||||
- Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
- Typical value, FWHM
